- 作者: Chang, Ming-Ming; Chen, Chi-Chen; Liu, C.S.; Chang, Chao-Ying; Shu, Frank R.
- 作者服務機構: Institute of Applied Chemistry, National Tsing Hua University, Hsinchu, Taiwan, R.O.C.
- 中文摘要: --
- 英文摘要:
An analytical procedure for the determination of metal nd non-metal
impurities at ppm level in crude silicon and purified trichlorosilane has been
developed. The analyses of most metal impurities are carried out with direct
atomic absorption spectrophotometric techniques. A fluoremetric method is
developed for the assay of aluminum. Boron and phosphorus are determined via
the methylene blue method and the molybdophosphoric acid method, respectively.
Our analytical data clearly indicates that the chlorination process of our design is
highly effective in removing impurities in the course of chemical purification of
silicon. - 中文關鍵字: --
- 英文關鍵字: --