• 作者： Yen, Shi-Chern; Wang, Chih-Ta
• 中文摘要： 本文探討在旋轉盤上具不均勻初始液膜值的牛頓型塗佈流體的膜形成現象,並得到其在極小雷諾數下的理論解析解,另外對於旋轉塗佈時的蒸發導致膜厚不均勻亦有所探討。隨著時間增加,對於具低蒸發速率的流體其膜厚漸漸變均勻。文中定義相對於瞬時平均膜厚之均勻度因子來表示膜之均勻性,並提出臨界蒸發參數的觀念。為使薄膜更均勻可採用具低蒸氣壓的流體,增加旋轉速度或使用較厚的液膜。
• 英文摘要： The coating film flow of a Newtonian fluid on the surface of a spinning disc is modeled and analyzed theoretically in this study. The effect of evaporation during the spin coating is investigated. Theoretical results for the case of small evaporation indicate that the coating film thickness becomes more uniform across the entire disc with increasing spinning time. When the initial film is nonuniform, the attenuation of wave amplitude is investigated and additionally a dynamic uniformity factor is defined to describe the degree of uniformity with time evolution. A criterion for the evaporation effect on achieving the film uniformity across the disc is also proposed. By simulation, a more uniform film can be obtained by employing a low-vapor-pressure solution, accelerating the spinning speed, using a thicker initial film and making the initial film more uniform.
• 中文關鍵字： 膜形成; 旋轉盤; 膜均勻度; 蒸發; 牛頓流體
• 英文關鍵字： Film Formation; Spinning Disc; Film Uniformity; Evaporation; Newtonian Fluid