• 作者： 吳添壽; 魏炯權; 方寶村
• 作者服務機構： 國立成功大學電機工程學系
• 中文摘要： 本文利用射頻濺鍍法及使用粉末射靶，研究將PLZT薄膜濺鍍在藍寶石基板上之製造技術。射靶是用PLZT陶瓷粉做成，外加8 wt%的氧化鉛做為晶體成長時補償之用。沈積薄膜時，基板溫度維持在620℃左右。首先，找出在各種不同濺鍍條件時的沈積率，並以X－射線分析所沈積之薄膜，以求出最佳濺鍍條件，並將薄膜之結構分成三類：鈣鈦礦(Perovskite PLZT)結構、黃綠石(Pyrochlore)結構及混合型結構。其次測PLZT薄膜之介電性及光學性質，並進一步探測薄膜厚度對介電性之影響，熱處理對薄膜透明度之改良效果。最後，測量PLZT薄膜之光電效應，同時，提出以PLZT薄膜設計反射光調變器之可行性。
• 英文摘要： A technique for preparation of PLZT thin film on sapphire by rf sputtering using a powder targethas been developed. The target is made of pulverized PLZT ceramics. An excess of 8 wt% PbO has beenadded in the target to act as a flux for crystal growth. During deposition, the substrate temperature is keptat around 620℃ to obtain the films. The deposition rate under various pressure ratio Ar/ (方程式無法摘錄) is studied.The structures of films are analyzed by X-ray diffraction and classified into three types depending on sub-strate temperature and pressure ratio Ar/ (方程式無法摘錄) ：the perovskite type (PLZT), the pyrochlore type, and themixed type of both. Films with dielectric and optical properties of considerable quality have been obtainedunder certain conditions. The effects of film thickness and film temperature at measurement on the dielec-tric properties are investigated. The transparency of films can be improved by proper heat treatment. Thedispersive property is also measured. Finally, it is demonstrated that PLZT thin films exhibit an electro-optic effect. This effect is measured by the reflection technique and suggests the possibility of a reflection-type light modulator consisting of a thin film.
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