• 作者： 朱正煒; 李正中; 傅以勇; 徐進成; 劉裕永
• 作者服務機構： 中央大學光電科學研究所
• 中文摘要： 本文提出一個製作橢圓偏光儀的新方法，是以氦氖雷射作為光源，ADP晶體所製成的Pockels cell作為相位偏移器，以相位偏移技術製作相位偏移式橢圓偏光儀。線偏極光的相位被Pockels cell偏移0、π/2、π。文中詳細描述了系統的架構、原理、校正；也詳細分析了因元件調整對光的不準所造成的系統誤差：δΨ<0.032°、δ△<0.190°。從原理很容易了解，因相位偏移的不準僅對△造成影響，其誤差量正好等於相位偏移誤差量，因此很容易作修正。此方法不但操作方便，而且原理簡單，造價便宜；又因無機械移動，故系統精確度極高，且理論上系統誤差也較小。以此技術測量了BK-7、PC及PMMA的光學常數，其誤差小於0.001。
• 英文摘要： We propose the development of a new ellipsometry technique which is based on a phase-shiftingmethod, where an electro-optic modulator made of ADP crystals is used for phase shifting. So, we callin a phase-shifting ellipsometer. The light source is a 1 mW He-Ne laser. The intensities changed asthe phase retardation was shifted by 0, π/2 and π. The design, alignment, and calibration of the systemare discussed in detail. Once the optical system is aligned, all the components require no moving parts;hence, precision is high The accuracy of the results has been evaluated, and the errors introduced onΨ and △ are <0.0320 and 0.190°,respectively. The inaccuracy of the phase shift can only introduce anerror on △, and the degree of error on △ is the same as that on T, so it is very easily modified. Themeasured optical constants of BK-7，PC and PMMA with errors of less than 0.1%have been demonstrated.
• 中文關鍵字： ellipsometry; phase-shifting technique; eletro-optic modulator; optical constant
• 英文關鍵字： --