• 作者： Lee, Lang-Luen; Hong, Lung-Chang; Hong, Lu-Sheng; Tsai, Dah-Shyang
• 中文摘要： 本文以數值方法分析化學氣相沈積修飾無機多孔模之孔洞構造的效果，我們使用兩種孔洞構造模型，折曲度定值的毛細管模型，與折曲度可變的隨機重疊球模型，若使用之化學氣相沈積系反應性高，則修飾深度淺；反之，若沈積系反應性低，則修飾深度深入。修飾宜按孔洞尺寸與其分佈選擇恰當之沈積速率，若沈積速率高，則納米尺寸的孔洞將快速堵死。修飾前之孔洞分佈對犧牲透過率換取孔洞縮小效果有重要的影響，常規分布的孔洞尺寸縮小比偏向小孔尺寸的對數分布縮小有效，對數分布的孔洞甚至可能犧牲透過率，卻得到平均孔徑不減小反而增大的結果，氣相反應可有助於減少孔洞尺寸的分散寬度，但其效果極小。
• 英文摘要： Pore structure modification of an inorganic membrane through chemical vapor deposition analyzed numerically. Two pore structures, a capillary model with a fixed tortuosity and a randomly overlapped sphere model with a variable tortuosity, are used. For a deposition system of high reactivity, the modification depth in membrane is shallow. On the other hand, if the reactivity of deposition system is low, the modified depth is long. The deposition rate should be carefully selected according to the pore size and its distribution. A pore of nano-size will be clogged instantly, if a reaction system of fast deposition rate is applied. The initial pore size distribution is a crucial factor in pore narrowing at the expense of permeance. The average pore size of normal distribution is narrowed down more efficiently than a log-normal distribution that skews to small pores. A log-normal distribution of significant standard deviation may have an increase in average pore size, despite a permeance loss. The gas-phase reaction can help narrow the pore size distribution, but unfortunately its effect is usually very small.
• 中文關鍵字： 孔洞構造; 化學氣相沈積; 動力學; 孔洞大小分布
• 英文關鍵字： Pore Structure; Chemical Vapor Deposition; Kinetics; Pore Size Distribution