- 作者: 裘性天 ; 張高榜 ; 何文郁 等
- 作者服務機構: 交通大學應用化學系
- 中文摘要: The bistertbutylimido complexes [ MoCl(.mu.-Cl)(NBu/sup t/)/sub 2/(NH/sub 2/Bu/sup t/) ] /sub 2/ (1), and MoCl/sub 2/(NBu/sup t/)/sub 2/(py)/sub 2/, (2)(py=pyridine), were prepared by reacting MoCl/sub 2/(NBu/sup t/)/sub 2/(dme) (dme=dimethoxyethane) with excess Bu/sup t/NH/sub 2/ and pyridine, respectively. Their structures were determined by X-ray crystallography. (1) has a pseudo edge-shared bioctahedral geometry with two Cl ligands bridging the Mo centers unequally. Pertinent bond distances and angles for (1), Mo=NBu/sub bent//sup t/= 1.737(3).ANG., .ANGLE.Mo=N-CMe/sub 3/=154.0(2).degree.; Mo=NBu/sub linear//sup t/=1.725(3).ANG., .ANGLE.Mo= N-CMe/sub 3/=172.4(2).degree.; Mo-Bu/sup t/NH/sub 2/= 2.233(2).ANG.; Mo-Cl/sub bridging/=2.575(1) and 2.835(1).ANG., and Mo-Cl/sub terminal/=2.428(1).ANG.. Crystal data for (1): triclinic, space group P.1bar., a=8.897(4).ANG., b=10.518(3).ANG., c=10.663(3).ANG.,.alpha.=107.68(2).degree., .beta.=98.03(3).degree.,.gamma.=99.26(3).degree., V=919.3( 5).ANG./sup 3/, Z=1, D/sub c/=1.381g/mL. (2) is mononuclear with a distorted octahedral geometry with two trans Cl ligands, two cis-oriented Bu/sup t/N=ligands, and two py ligands trans to the imido groups. Pertinent averaged bond distances and angles for (2), Mo=NBu/sub bent//sup t/=1.736(4).ANG.,.ANGLE.Mo=N-CMe/sub 3/=163.8(4).degree.; Mo=NBu/sub linear//sup t/=1.705(5).ANG.,.ANGLE.Mo=N-CMe/sub 3/=173.4(4).degree.; Mo-N(py)=2.44(1), Mo-Cl=2.421(3).ANG.. Crystal data for (2): orthorhombic, space group Pna2/sub 1/, a=16.860(2).ANG., b=8.920(3).ANG., c=15.120(3).ANG., V=2274.1(9).ANG./sup 3/, Z=4, D/sub c/= 1.362g/mL. A potential application of (2) as a single- source precursor to grow molybdenum nitride and molybdenum carbonitride thin films by low pressure chemical vapor deposition (LPCVD) was explored. Cubic phase thin films(a/sub thin film/=4.16-4.20.ANG.) were grown at temperatures between 450.degree.C and 650.degree.C with hydrogen as carrier gas. At 450.degree.C, thin films of molybdenum nitride were obtained. With temperature of deposition increased from 450.degree.C to 650.degree.C, the ratio C/Mo increased from 0.03 to 0.5 whereas the ratio N/Mo decreased from 0.7 to 0.3. Thus, thin films of molybdenum carbonitride were deposited at 650.degree.C.
- 英文摘要: --
- 中文關鍵字: Crystal Structure; Molybdenum Complex; Synthesis; X-Ray Crystallography; Crystallization
- 英文關鍵字: 晶體結構;鉬錯合物;合成;X射線結晶學;結晶