- 作者: 秦啟宗 ; 張抗戰 ; 盧平和 等
- 作者服務機構: 上海巿復旦大學雷射化學研究所
- 中文摘要: A cw supersonic Cl/sub 2/ molecular beam coupled with an angle-resolved time-of-flight (TOF) technique has been used to investigate the laser-enhanced surface reaction of GaAs(100) with chlorine. The mass and velocity distributions of the major reaction products under 1064nm laser irradiation have been measured as a function of laser fluence, detection angle, surface temperature and normal component of the translational energy of the incident chlorine molecules. It has been found that increasing both laser fluence and the translational energy of incident chlorine molecules markedly enhance this surface reaction. The measured flux angular distributions of major reaction products can be fit satisfactorily with a bi-cosine function. Measurements of the mass and angular distributions of reaction products by a modulated molecular beam mass spectrometry show that the surface temperature effect is obvious for the Cl/sub 2//GaAs(100) "dark" thermal reaction. A direct activated dissociative chemisorption is proposed for the mechanism of Cl/sub 2/ chemisorption on the GaAs(100) surface.
- 英文摘要: --
- 中文關鍵字: Molecular Beam; Angle-Resolved Time-Of-Flight Technique; Surface Reaction; Chemisorption
- 英文關鍵字: 分子束;角度解析時間飛行技術;表面反應;化學吸附