- 作者: Chen, Chi-Chen; Chang, Ming-Ming; Shu, Frank R.; Liu, Chao-Shiuan
- 作者服務機構: Institute of Applied Chemistry, National Tsing Hua University, Hsinchu, Taiwan, R.O.C.
- 中文摘要: --
- 英文摘要:
The chlorination of crude silicon (~98% purity) by anhydrous hydrogen
chloride gas is studied in terms of the effects of temperature, HCl flow rate, silicon
particle size and silicon packing height. A fairly wide range of working condition
is found which will give the best yield of the desired product trichlorosilane SiHCl3.
The results are discussed and compared with some existing data from the works of
T.H. Loh [1] and G. Pauls [2, 3, 4]. An attempt using Cu powder as catalyst is
tried but no catalytic effect is observed. - 中文關鍵字: --
- 英文關鍵字: --