• 作者： 方昆清;蘇青森
• 作者服務機構： 國立清華大學核工研究所
• 中文摘要： 用於固體表面成份分析之低能量離子散射儀已完成設計與建造。本儀器用作固體最外層原子之確認係根據彈性二元撞擊型之理論。鋯-鈮合金、鈦金屬及鈷金屬曾被用作試樣以測氬離子在90°散射之能譜。樣品表面上受銀，鎢及銅之污染亦曾被測定。
• 英文摘要： A low energy ion scattering spectrometer has been built for composition analysis of solid surface. Identification of atoms on the outmost atomic layer of solid based on the simple elastic binary collision model was described. Energy spectra of Ar ions backscattering 90?from Zr-Nb alloy, Ti, and Co metals have been obtained with primary ion energies in the 500-1000 eV range. Trace amount of Ag, W, and Cu from the surface contamination of the samples were observed.
• 中文關鍵字： --
• 英文關鍵字： --