• 作者： 章明;胡錦標
• 作者服務機構： 私立中原大學機械工程系;國立臺灣大學機械工程系
• 中文摘要： 本文介紹一種以光學非接觸方式量測物體表面粗度的方法，量測系統主要由一壓電換能器管制參考波相位變化的Twyman-Green干涉儀、光二極體檢測列組及微電腦界面系統組成，由電腦控制，藉相移干涉術的理論，進行物體表面輪廓高度變化的量測，就目前所研製完成的系統而言，表面粗度在0.001μm至2 μm rms之間任意性質的表面，均可得到高精度的量測結果，且不會影響量測表面原有粗度值，由於量測速度快速及精度高等特性，可以發展成為一種製程中量測的粗度量測儀。
• 英文摘要： An optical surface roughness measuring instrument has been developed which provides a noncontactmethod of obtaining surface characteristics of engineering surfaces. The system consists of a standardTwyman-Green interferometer controlled by a piezoelectric transducer, a linear array of photodiodedetectors, and a microcomputer. The combination yields a system that measures the height variations ofsurfaces to a high degree of precision. Theoretical analysis and experimental systems are described. Surfaceroughness measurements are made in mirror, pre-coating surfaces, epoxy-painting surfaces, and fine-machin-ed aluminum surfaces. Experimental results show that the measuring range of the sensitivity is from below0.001 um up to 2 um rms. Due to the ability of high precision and fast measurement speed an on-linemetrological tool for roughness measurement of engineering surfaces can be developed.
• 中文關鍵字： surface roughness measurement; Twyman-Green interferometer; phase-shifting interferometry; detector array; computer control
• 英文關鍵字： --