- 作者: 張世易 ; 左台利 ; 羅俊光
- 作者服務機構: 清華大學原子科學研究所
- 中文摘要: An FTIR spectrometer having a long absorbing path in an open field mode is applied to measure the air quality of semiconductor facilities, especially for chemical solvent vapors. This spectrometer is demonstrated to be a proper instrument to monitor chemical solvents widely used in the manufacture of integrated circuits. By means of the great sensitivity accruing from the kilometer pathlength, we discovered that many residual chemical solvent vapors are released in these workplaces; the limit of detection can attain the level of parts per billion by volume. Recognized spectra of chemical solvents, such as 2-ethoxyethyl acetate, 2-propanol, hexamethyl disilazane, aromatic hydrocarbons, alkyl derivatives of phenol, alkyl benzene sulfonate and dimethyl sulfoxide, are calibrated qualitatively and quantitatively. The related integrated absorption coefficients (or band intensities) are listed in this paper. By examining the measured spectra, we found two chemical solvents (2-propanol and hexamethyl disilazane) in the workplace, at concentrations about 20-500ppbv in such environments.
- 英文摘要: --
- 中文關鍵字: Chemical Solvent Vapor; Semiconductor; Fourier Transform Infrared Spectrometry; Absorption Coefficient; Sensitivity
- 英文關鍵字: 化學溶劑蒸氣;半導體;傅立葉變換紅外線光譜儀;吸光係數;靈敏度