- 作者: 凌永健
- 作者服務機構: 清華大學化學系
- 中文摘要: Secondary ion mass spectrometry (SIMS) has inherent features of high sensitivity, great dynamic range, and capability to provide spatially resolved chemical information making it well suited for trace and microanalysis of diverse materials. The various SIMS methods used to derive the boron distribution in hepatoma cells, to investigate the inter-layer reactions in multi-layer ceramic structural materials, and to evaluate the effects of fabrication on microstructural and functional properties in semiconductor devices, are presented to illustrate possible roles of SIMS in microanalysis.
- 英文摘要: --
- 中文關鍵字: Microanalysis; Metallization; Secondary Ion Mass Spectrometry; Semiconductor
- 英文關鍵字: 微量分析;金屬化;二級離子質譜測定術;半導體