- 作者: 周更生;李豫華
- 作者服務機構: 國立清華大學化工研究所
- 中文摘要: 本文旨在運用數值分析方法,探討氣體在水平式化學氣相沉積反應器內之流動情形。重點則?分析傾斜的石墨基座與水銀容器等物品對氣體流動之效應。其它之變數則包括生長壓力及氣體流量。此外反應器內是否會生成渦流及影響其形成之因素亦?討論重點之一。而分析結果顯示,Ra及Gr/Re2兩個參數皆無法有效描述所有情況下,開始發 生渦流之條件。然而對於?向渦流而言,Gr/Re2應?較合適之參數,而且亦可由本文所提供之二維模式加以模擬。
- 英文摘要: A 2-dimensional mathematical model was established to simulate the gas flow patterns in a horizontal cvd reactor. The effects of extra objects, such as an inclined graphite susccptor and Hg reservoir, under various flow conditions were evaluated. Special emphasis was put on the formation of a vortex due to natural convection. Our results indicated that neither Ra nor Gr/Re2 was capable of predicting the onset of natural convection for all situations. Nonetheless, Gr/Re2 was the better choice for describing a transverse rolling wave, which can be easily analyzed by our 2-D model reported here.
- 中文關鍵字: finite-difference flow simulations; vortex; CVD
- 英文關鍵字: --