- 作者: 吉凱明 ; 侯宏昌 ; 陳國憲 等
- 作者服務機構: 中正大學化學系
- 中文摘要: Copper(I) complexes of general formula (.beta.- diketonate)Cu(7-AcO-NBD), where 7-AcO-NBD=7-nor-bornadienyl acetate and .beta.-diketonate=1,1,1,5,5,5-hexafluoro-2,4- pentanedionate (1), 1,1,1-trifluoro-2,4-pentanedionate, 2,4- pentanedionate, 4,4,4- trifluoro-1-(2-thienyl)-1,3- butanedionate, 4,4,4-trifluoro-1-phenyl-1,3-butanedionate, were prepared from reactions of CuCl with Na(.beta.- diketonate) in the presence of 7-AcO-NBD. All compounds were characterized by elemental analyses, /sup 1/H, / sup 13/ C, /sup 19/F NMR and IR spectra. Single-crystal structure of compound 1 was determined by X-ray diffraction analysis that showed a mononuclear copper species with coordination of a chelating .beta.-diketonate ligand through two oxygen atoms and the 7-AcO-NBD through its C=C double bond and an oxygen atom in the solid state. For compound 1, the crystal data are: triclinic, space group P.1bar., a=5.4519(14).ANG., b=11.852(3).ANG., c=13.304(3).ANG., .alpha.=74.721(20).degree., .beta.=80. 220(20).degree., .gamma.=76.848(19).degree., Z=2, R/sub F/=0.060 and R/sub W/=0.064. Hot-wall chemical vapor deposition experiments revealed that compound 1 is suitable as a precursor for deposition of copper films in the temperature range 170-260. degree.C.
- 英文摘要: --
- 中文關鍵字: Single Crystal Structure; Chemical Vapor Deposition; Copper Film; Copper(I) Complex
- 英文關鍵字: 單晶結構;化學蒸氣沈積;銅薄膜;亞銅錯合物