• 作者： 洪聯馨; 林世昌
• 作者服務機構： 清華大學動力機械研究所
• 中文摘要： 本文提出三軸微定位之磁浮架構及控制方法，並予以實施。所提之架構包含一個懸浮於空中之箱型物體和四組置於此懸浮物體四個中間點之電磁鐵。在此架構下，提出基於二輸入二輸出之滑動模式控制法則，並成功地應用於控制此懸浮物體在三個垂直方向之微定位。為研究其可行性，本文建立磁浮實驗系統，並實施基本測試。測試結果顯示本文所提之磁浮架構及控制方法具可行性。
• 英文摘要： A configuration and control of magnetic suspension for a three-axis fine positioning system areproposed and implemented as described in this paper. The proposed configuration consists of a box-shapedbody suspended in space and four sets of electromagnets placed at four middle points of the suspendedbody. Due to this configuration, the proposed control algorithm based on a two-input two-output slidingmode control is successfully applied to control the fine motion of the suspended body in three perpendiculardirections. For a feasibility study, an experimental magnetic suspension system was built, and primitivetests were conducted. The test results demonstrate the feasibility of the propositions in this paper.
• 中文關鍵字： fine positioning; magnetic suspension; multivatiable control
• 英文關鍵字： --